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S.M. Gulwadi, M.V. Rao, A.K. Berry, D.S. Simons, P.H. Chi, and H.B.
Dietrich.
Transitional metal implants in In0.53Ga0.47As.
J. Appl. Phys., 68(8):4222-4227, 1991. BibTeX entry |
| [2] |
R.K. Nadella, M.V. Rao, D.S. Simons, P.H. Chi, M. Fatemi, and H.B.
Dietrich.
High energy Si implantation into InP:Fe.
J. Appl. Phys., 70(3):1750-1757, 1991. BibTeX entry |
| [3] |
M.V. Rao, P.E. Thompson, R. Echard, S. Mulpuri, A.K. Berry, and H.B.
Dietrich.
Be, S, Si, and Ne ion implantation in InSb grown on GaAs.
J. Appl. Phys., 69(8):4228-4233, 1991. BibTeX entry |
| [4] |
R.K. Nadella, M.V. Rao, D.S. Simons, and P.H. Chi.
0.4-3.0-MeV range Be-ion implantations into InP:Fe.
J. Appl. Phys., 70(6):2973-2978, 1991. BibTeX entry |
| [5] |
M.V. Rao, J.A. Gardner, P.H. Chi, O.W. Holland ang G. Kelner,
J. Kretchmer, and M. Ghezzo.
Phosphorous and boron implantation in 6H-SiC.
J. Appl. Phys., 81(10):6635-6641, 1997. BibTeX entry |
| [6] |
M.V. Rao, S.M. Gulwadi, P.E. Thompson, A. Fathimulla, and O.A. Aina.
Halogen lamp rapid thermal annealing of Si- and Be-implanted
In0.53Ga0.47As.
J. Electron Mater., 18(2):131-136, 1989. BibTeX entry |
| [7] |
M.V. Rao, P. Griffiths, J. Gardner, O.W. Holland, M. Ghezzo, J. Kretchmer,
G. Kelner, and J.A. Freitas.
Al, Al/C and Al/Si implantations in 6H-SiC.
J. Electron Mater., 25(1):75-80, 1996. BibTeX entry |
| [8] |
M.V. Rao, J. Tucker, O.W. Holland, N. Papanicolau, P.H. Chi, J.W.
Kretchmer, and M. Ghezzo.
Donor ion implantation doping into SiC.
J. Electron Mater., 28(3):334-340, 1999. BibTeX entry |
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E.V. Handy, M.V. Rao, O.W. Holland, P.H. Chi, K.A. Jones, M.A.
Derenge, R.D. Vispute, and T. Venkatesan.
Al, b, and ga ion-implantation doping of sic.
J. Electron Mater., 29(11):1340-1345, 2000. BibTeX entry |
| [10] |
N. Papanicolau, M.V. Rao, B. Molnar, J. Tucker, A. Edwards, O.W. Holland,
and M.C.Ridgway.
Ion implantation in sic and gan.
Nucl. Instr. and Meth. B, 148:416-420, 1999. BibTeX entry |
| [11] |
V.I. Shulga and W. Eckstein.
Depth of sputtered atoms for elemental targets.
Nucl. Instr. and Meth. B, 145:492-502, 1998. BibTeX entry |
| [12] |
V.I. Shulga.
Depth-dependent angular distribution of sputtered atoms.
Nucl. Instr. and Meth. B, 155:382-394, 1999. BibTeX entry |
| [13] |
V.I. Shulga.
The density effects in sputtering of amorphous materials.
Nucl. Instr. and Meth. B, 170:347-361, 2000. BibTeX entry |
| [14] |
A.F. Komarov, F.F. Komarov, P. Zukowski, Cz. Karwat, and A.A. Kamarou.
Simulation of two-beam ion implantation in the multilayer and
multicomponent targets.
Vacuum, 63:495-499, 2001. BibTeX entry |
| [15] |
Peter Sigmund and Andreas Schinner.
Effective charge and related/unrelated quantities in heavy-ion
stopping.
Nucl. Instr. and Meth. B, 174:535-540, 2001. BibTeX entry |
| [16] |
Mark T. Robinson.
Computer simulation of collision cascades in monazite.
Phys. Rev. B, 27(9):5347-5359, 1983. BibTeX entry |