jesman2.bib

@ARTICLE{Gulwadi91,
  AUTHOR = {{S.M.} Gulwadi and {M.V.} Rao and {A.K.} Berry and {D.S.} Simons and {P.H.}
		Chi and {H.B.} Dietrich},
  TITLE = {Transitional metal implants in {$In_{0.53}Ga_{0.47}As$}},
  JOURNAL = {J. Appl. Phys.},
  VOLUME = 68,
  YEAR = 1991,
  PAGES = {4222--4227},
  NUMBER = 8
}


@ARTICLE{Nadella91,
  AUTHOR = {{R.K.} Nadella and {M.V.} Rao and {D.S.} Simons and {P.H.} Chi and M. Fatemi
		and {H.B.} Dietrich},
  TITLE = {{High energy Si implantation into InP:Fe}},
  JOURNAL = {J. Appl. Phys.},
  VOLUME = {70},
  YEAR = {1991},
  PAGES = {1750--1757},
  NUMBER = {3}
}


@ARTICLE{Rao91,
  AUTHOR = {{M.V}. Rao and {P.E.} Thompson and R. Echard and S. Mulpuri and {A.K.} Berry
		and {H.B.} Dietrich},
  TITLE = {{Be, S, Si, and Ne ion implantation in InSb grown on GaAs}},
  JOURNAL = {J. Appl. Phys.},
  VOLUME = 69,
  YEAR = 1991,
  PAGES = {4228--4233},
  NUMBER = 8
}


@ARTICLE{Nadella91b,
  AUTHOR = {{R.K.} Nadella and {M.V.} Rao and {D.S.} Simons and {P.H.} Chi},
  TITLE = {{0.4-3.0-MeV range Be-ion implantations into InP:Fe}},
  JOURNAL = {J. Appl. Phys.},
  VOLUME = {70},
  YEAR = {1991},
  PAGES = {2973--2978},
  NUMBER = {6}
}


@ARTICLE{Rao97,
  AUTHOR = {{M.V.} Rao and {J.A.} Gardner and {P.H.} Chi and {O.W.} Holland ang G. Kelner
		and J. Kretchmer and M. Ghezzo},
  TITLE = {{Phosphorous and boron implantation in 6H-SiC}},
  JOURNAL = {J. Appl. Phys.},
  VOLUME = {81},
  YEAR = {1997},
  PAGES = {6635--6641},
  NUMBER = {10}
}


@ARTICLE{Rao98,
  AUTHOR = {{M.V.} Rao and {S.M.} Gulwadi and {P.E.} Thompson and A. Fathimulla and
		{O.A.} Aina},
  TITLE = {{Halogen lamp rapid thermal annealing of Si- and Be-implanted $In_{0.53}Ga_{0.47}As$}},
  JOURNAL = {J. Electron Mater.},
  VOLUME = {18},
  YEAR = {1989},
  PAGES = {131--136},
  NUMBER = {2}
}


@ARTICLE{Rao96,
  AUTHOR = {{M.V.} Rao and P. Griffiths and J. Gardner and {O.W.} Holland and M. Ghezzo
		and J. Kretchmer and G. Kelner and {J.A.} Freitas},
  TITLE = {{Al, Al/C and Al/Si implantations in 6H-SiC}},
  JOURNAL = {J. Electron Mater.},
  VOLUME = {25},
  YEAR = {1996},
  PAGES = {75--80},
  NUMBER = {1}
}


@ARTICLE{Rao99,
  AUTHOR = {{M.V.} Rao and J. Tucker and {O.W.} Holland and N. Papanicolau and {P.H.} Chi and {J.W.} Kretchmer and M. Ghezzo},
  TITLE = {{Donor ion implantation doping into SiC}},
  JOURNAL = {J. Electron Mater.},
  VOLUME = {28},
  YEAR = {1999},
  PAGES = {334--340},
  NUMBER = {3}
}


@ARTICLE{Handy2000,
  AUTHOR = {{E.V.} Handy and {M.V.} Rao and {O.W.} Holland and {P.H.} Chi and {K.A.} Jones and {M.A.} Derenge and {R.D.} Vispute and T. Venkatesan},
  TITLE = {Al, B, and Ga ion-implantation doping of SiC},
  JOURNAL = {J. Electron Mater.},
  VOLUME = {29},
  YEAR = {2000},
  PAGES = {1340--1345},
  NUMBER = {11}
}


@ARTICLE{Papanicolau99,
  AUTHOR = {N. Papanicolau and {M.V.} Rao and B. Molnar and J. Tucker and A. Edwards and {O.W.} Holland and {M.C.}Ridgway},
  TITLE = {Ion implantation in SiC and GaN},
  JOURNAL = {Nucl. Instr. and Meth. B},
  VOLUME = {148},
  YEAR = {1999},
  PAGES = {416--420}
}


@ARTICLE{Shulga98,
  AUTHOR = {{V.I.} Shulga and W. Eckstein},
  TITLE = {Depth of sputtered atoms for elemental targets},
  JOURNAL = {Nucl. Instr. and Meth. B},
  VOLUME = {145},
  YEAR = {1998},
  PAGES = {492--502}
}


@ARTICLE{Shulga99,
  AUTHOR = {{V.I.} Shulga},
  TITLE = {Depth-dependent angular distribution of sputtered atoms},
  JOURNAL = {Nucl. Instr. and Meth. B},
  VOLUME = {155},
  YEAR = {1999},
  PAGES = {382--394}
}


@ARTICLE{Shulga2000,
  AUTHOR = {{V.I.} Shulga},
  TITLE = {The density effects in sputtering of amorphous materials},
  JOURNAL = {Nucl. Instr. and Meth. B},
  VOLUME = {170},
  YEAR = {2000},
  PAGES = {347--361}
}


@ARTICLE{Komarov2001,
  AUTHOR = {{A.F.} Komarov and {F.F.} Komarov and P. Zukowski and Cz. Karwat and {A.A.} Kamarou},
  TITLE = {Simulation of two-beam ion implantation in the multilayer and multicomponent targets},
  JOURNAL = {Vacuum},
  VOLUME = {63},
  YEAR = {2001},
  PAGES = {495--499}
}


@ARTICLE{Sigmund2001,
  AUTHOR = {Peter Sigmund and Andreas Schinner},
  TITLE = {Effective charge and related/unrelated quantities in heavy-ion stopping},
  JOURNAL = {Nucl. Instr. and Meth. B},
  VOLUME = {174},
  YEAR = {2001},
  PAGES = {535--540}
}


@ARTICLE{Robinson83,
  AUTHOR = {{Mark T.} Robinson},
  TITLE = {Computer simulation of collision cascades in monazite},
  JOURNAL = {Phys. Rev. B},
  VOLUME = {27},
  YEAR = {1983},
  PAGES = {5347--5359},
  NUMBER = 9
}